滨州Multi-Chamber Vacuum Welding Degassing Furnace EVD440

Continuous operation of infrared detectors: degassing, wafer baking, and drying.

Category:

滨州High Vacuum Furnaces

86 400-673-6773

Product Description

1. Application areas:

Continuous operation of infrared detectors: degassing, wafer baking, and drying.

2. Equipment Features

*The entire machine features four chambers that can operate simultaneously or independently, offering both high- and low-temperature degassing as well as vacuum sealing and soldering.

*Customizable automated rail-guided hatch opening, front-to-back transfer, and automatic opening and closing of front and rear doors

*Large-scale operations, enabling batch and continuous production

*Uniform temperature distribution and rapid, precise heating and cooling rate control, with vacuum pumping, nitrogen purging, and water-cooling capabilities.

*Real-time monitoring of multiple critical parameters within the cabin, including temperature, pressure, and vacuum level.

3. Equipment Parameters

Project	Parameters
Equipment dimensions	1800mm1160mm1900mm
Lumen height	100mmmm
Observation window	Observation window provided at the front of the chamber
Weight	950 kg
Vacuum pump	Dry vacuum pump
Process vacuum	10 Pa
Process gas	Nitrogen
Heating method	Infrared radiation heating, heating rate ≥90°C/min
Cooling method	Water-jacket cooling and N2, heating rate ≥90°C/min
Heating area (single chamber)	400mm*350mm
Heating area (four chambers)	(400mm350mm)4
Temperature control accuracy	±1℃
Hot plate uniformity	±2.5℃%
Detection Channel	8 channels (multiple channels optional)
Power Requirements	380 V, 50 Hz, power ≤ 70 kW
Standard Configuration	Vacuum pump, chiller, curve control
Optional addition device	High-vacuum system, automated transfer