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MUX300 Thermally Activated High-Vacuum Welding Furnace

Gyroscopes, sensors, and infrared detectors

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Product Description Download

1. Application areas:

Gyroscopes, sensors, and infrared detectors

2. Equipment Features

*Used in the activation and hermetic sealing processes for products equipped with getters, enabling high-vacuum, high-temperature activation as well as high- and low-temperature melt-seal soldering.

* Dedicated lifting mechanism + thermal insulation device, fully ensuring an effective temperature differential and completely without affecting the secondary cover plate seal welding.

*Custom-made tooling fixtures for different products, with large dimensions and capable of mass production, thereby increasing production output and operational efficiency.

*The entire product is placed on the fixture and secured using an L-shaped clamp, achieving a positioning accuracy of 0.02 mm.

*Ultra-high vacuum can reach 10⁻⁵ Pa, with perfect high-vacuum, high-temperature activation and welding activation curves.

3. Equipment Parameters

Project Parameters
Equipment dimensions 1500mm*900mm*840mm
Lumen height 500mm
Observation window Observation window provided at the front of the chamber
Weight 500Kg
Vacuum pump Dry vacuum pump + molecular pump
Process vacuum 10-5Pa
Process gas Nitrogen
Heating method Infrared radiation heating, heating rate ≥ 120°C/min
Cooling method Water-jacket cooling and N2, heating rate ≥120°C/min
Heating area 270mm*300mm
Temperature range Room temperature to 450°C
Temperature control accuracy ±1℃
Hot plate uniformity ±2.5℃%
Detection Channel 4 channels (multiple channels optional)
Power Requirements 380 V, 50 Hz, power ≤ 25 kW
Standard Configuration Vacuum pump, chiller, and air piping system
Optional addition device Positive-pressure system, high-vacuum system, flux recovery system, vision system
Lift platform sealing The drive shaft features a unique bellows-type seal, ensuring zero leakage during operation.
Number of work uniforms placed Customized according to the product

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